Citation link:
Authors:
Hristov, Marin; Христов, Марин; Veleva, Plamena; Велева, Пламена; Denishev, Krasimir; Денишев, Красимир; Grozdanov, Vladimir; Грозданов, Владимир; Gaydazhiev, Dobromir; Гайдажиев, Добромир
Title:
Design and investigation of an accelerometer
Date of Issue:
2008
Is Part of:
Proceedings of the Technical University – Sofia, 58(2), 2008, pp. 253-258
Publisher:
Технически университет - София
Identifiers:
1311-0829 [issn]
Type:
Article
Language:
eng
Subject:
MEMS, accelerometer, PolyMUMPs, surface micromachining
Abstract:
The past few years have witnessed an increasing maturity of the MEMS industry and a rapid introduction of new products addressing applications, ranging from biochemical analysis to fiber-optic telecommunications. The market size for MEMS products has doubled in the past 5 years and is projected to grow at this fast rate for the foreseeable future. The corresponding technology has enjoyed a fast pace of development and has rapidly spread to institutions and companies on all inhabited continents. MEMS accelerometers are one of the simplest but also most applicable microelectromechanical systems. They became indispensable in automobile industry, computer and audio-video technology. This paper presents the design and simulation of an accelerometer with default and not default tether (two different sets of tethers) and investigates the displacements to x,y,z-axis.
Description:
Reviewer prof. Valentin Videkov. – Figuras, formulas, schemes. - References, pp. 258
