Citation link:
Authors:
Denishev, Krassimir Hristov; Денишев, Красимир Христов; Petrova, Mihaela; Петрова, Михаела
Title:
Accelerometer design
Date of Issue:
2007
Is Part of:
Proceedings of the Technical University – Sofia, 57(2), 2007, pp. 281-286
Publisher:
TU – Sofia
Identifiers:
1311-0829 [issn]
Type:
Article
Language:
eng
Abstract:
Much effort is being applied to the development of intelligent, autonomous Micro Electro Mechanical Systems (MEMS). One kind of such devices, these are Accelerometers. Nowadays, they find very large applications in different areas of life, science and techniques. Contemporary microelectronics and microelectronic technologies give the possibility to design and to produce an acceleration sensing device, together with the data processing system in the same production cycle, on the same semiconductor substrate, so called “smart sensors”. In the present paper, an explanation of the principles of operation, technological ways of production and application are given. A Microsystems Accelerometer is designed and presented.
Description:
Reviewer prof. Tihomir Takov. - Formulas, diagr. - References, pp. 286
