Dobrikov, Georgy Hristov; Добриков, Георги Христов; Rassovska, Milka Markova; Расовска, Милка Маркова; Boiadjiev, Stefan Ivanov; Бояджиев, Стефан Иванов; Gesheva, Kostadinka A..; Гешева, Костадинка А.; Sharlandjiev, Peter Stoyanov; Шарланджиев, Петър Стоянов; Koserkova, Albena; Косеркова, Албена

Microstructure and optical properties of ito thin films investigated for heat mirrors in solar collectors

2007

Proceedings of the Technical University – Sofia, 57(2), 2007, pp. 276-280

TU – Sofia

1311-0829 [issn]

Article

eng

The aim of this work is preparation of RF sputtered ITO thin films for application as heat mirrors in solar thermal collectors. The alteration of optical properties and behavior in IR spectra of additionally treated films was investigated. The films were deposited on silicon and glass substrates by RF sputtering on vacuum installation A-400 VL. For deposition of films were used targets with composition indium-tin 90:10 and 95:5 mol%. The films microstructure was studied by TEM and SEM. Optical and electrical properties as well as microstructure of the films change considerably after heat treatment. The measurements in IR range of as-deposited ITO layers and heat treated ones were performed by Fourier transform infrared spectrophotometer Shimadzu Prestige 21. The as-deposited ITO films showed 45% in the Infrared, and after annealing at 5000C additional treatment, the films showed reflection in IR range not exceeding 60% at longer wavelengths. The films have high visible transmition measured with CARY 5E – spectrophotometer.

Reviewer prof. Tihomir Takov. -Diagr. - References, pp. 280