Citation link:
Authors:
Boyadjiev, Stefan Ivanov; Бояджиев, Стефан Иванов; Rassovska, Milka Markova; Расовска, Милка Маркова
Title:
WO 3 thin films deposition on quartz crystal resonators for applications in gas sensors
Date of Issue:
2007
Is Part of:
Proceedings of the Technical University – Sofia, 57(2), 2007, pp. 266-269
Publisher:
TU – Sofia
Identifiers:
1311-0829 [issn]
Type:
Article
Language:
eng
Abstract:
The present research is focused on the preparation and properties of sputtered transition metal oxides thin films. WO3 films of various thickness were deposited on quartz resonators in order to use the quartz crystal microbalance method for studying heir gas sensing properties. The influence of oxygen partial pressure and substrate temperature on the composition, crystal structure and optical properties of the films was investigated. The films’ microstructure and physical properties were identified by Raman spectroscopy analysis. To study their optical properties the methods of infra-red spectrometry and laser ellipsometry were also used. The final objective of the research is the application of these thin films in gas sensors.
Description:
Reviewer prof. Tihomir Takov. - Formulas, diagr. - References, pp. 269
