Citation link:
Authors:
Hristov, Marin; Христов, Марин; Toshev, Kiril; Тошев, Кирил; Denishev, Krasimir; Денишев, Красимир; Grozdanov, Vladimir; Грозданов, Владимир; Gaydazhiev, Dobromir; Гайдажиев, Добромир
Title:
Design and simulation of accelerometer springs
Date of Issue:
2008
Is Part of:
Proceedings of the Technical University – Sofia, 58(2), 2008, pp. 247-252
Publisher:
Технически университет - София
Identifiers:
1311-0829 [issn]
Type:
Article
Language:
eng
Subject:
MEMS, acelerometer, spring, PolyMUMPs, SoftMEMs and ANSYS CAD systems
Abstract:
With the development of MicroElectroMechanicalSystems (MEMS), inertial instruments have seen significant progress over the past decades. The advantages of low-cost, low-power, small size, batch fabrication, makes MEMS-based inertial sensors have a wide range of applications in automotive, consumer, computer, and navigation markets. An accelerometer is internal sensor used to measure acceleration. This MEMS-based accelerometer uses a capacitive-sensing scheme for acceleration detection. This paper presents the design and simulation of two kinds of springs, built on the same principles, with different geometry parameters. The main aim of the work is to find, how the accelerometer parameters are changed, by using of different springs to attach the proof mass. Different spring types have different spring constants, depending on their geometry parameters like width, length, effective mass etc. We are going to find out, how the range of measured acceleration changes, if we use modified spring parameters.
Description:
Reviewer prof. Valentin Videkov. – Figuras, formulas, tables. - References, pp. 252
