Citation link:
Authors:
Videkov, Valentin Hristov; MIhaylova, Evelina Aleksandrova; Andreev, Svetozar Krastev; Iordanov, Nikola Stefanov
Title:
Production of 3D contact structures using the LIGA method
Date of Issue:
2006
Is Part of:
Proceedings of the Technical University – Sofia, 56(1), 2006, pp. 130-135
Publisher:
TU - Sofia
Identifiers:
1311-0829 [issn]
Type:
Article
Language:
eng
Subject:
3D contact structures; LIGA method; bimetal effect
Abstract:
The purpose of this report is finding an alternative method for 3D contact structures production, which is different from traditional silicon technology. The LIGA method showed capability of preparing such structures. For that purpose the technological sequence for LIGA process implementation in making of functional contact is investigated and improved. In order to make the contact commutate the circuit without human taking part in the process the bimetal effect is used. The test cantilever beams are made of two materials with different coefficients of linear expansion. For that reason when temperature rises the beam leans towards the material with lower coefficient and that makes commutation possible. In this paper the technological sequence for preparing such bimetal structures and results from experiments for checking their functionality are given.
Description:
Reviewer prof. Anna Andonova. - Figures. - References, pp. 135
